Benchmark of FEM, Waveguide and FDTD Algorithms for Rigorous Mask Simulation
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چکیده
An extremely fast time-harmonic finite element solver developed for the transmission analysis of photonic crystals was applied to mask simulation problems. The applicability was proven by examining a set of typical problems and by a benchmarking against two established methods (FDTD and a differential method) and an analytical example. The new finite element approach was up to 100× faster than the competing approaches for moderate target accuracies, and it was the only method which allowed to reach high target accuracies.
منابع مشابه
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تاریخ انتشار 2006